Measuring Range X  | 0~325mm  | 
Measuring Range Z  | 0~325mm  | 
Min Resolution  | 0.001μm  | 
Scanning Speed  | 0.1~2mm/s  | 
Measuring Force  | 10~150mN  | 
Max Slope  | Uphill 78º, downhill 87º  | 
Y Direction Object Table  | Travel range 25mm, Overall height 85mm(Motorized table is optional)  | 
Thread Measuring Range  | Interal: M3~M200, External: M3~M200(Determined by optional jigs)  | 
Accuracy(Maj., Pit., Min. Diamter)  | ≤±(4+L/100)μm, L is measured length in mmh  | 
Accuracy(Thread Pitch)  | ≤±(1 +L/100)μm, L is measured length in mm  | 
Diameter Measuring Range  | Internal: φ3~φ200, External: φ3~φ200(Determined by optional jigs)  | 
Diameter Measuring Accuracy  | ≤±(3+L/100)μm, L is measured length in mm  | 
Profile Degree Accuracy  | ≤±(2 +L/100)μm, L is measured length in mm  | 
Roughness Parameters  | R roughness: Rp, Rv, Rz, Rc, Rt, Ra, Rq, Rsk, Rku, RSm, RPc, Rdq, Rdc, Rmr, Rmax, Rpm, tp, Htp, Pc, Rda, Ry, Sm, S, Rpq, Rvq, Rmq, RzJ, Rv1max, Rp1max, Rz1max, Rmr(Rz/4), maxRa, R5z, R3z, Rh, Dq, Lq, SD Key roughness: Rcore: Rk, Rpk, Rvk, Mr1, Mr2, A1, A2 Profile: Pa, Pq, Pt, Pz, Pp, Pv, PSm, Psk, Pku, Pdq, Pdc, Pc, PPc, Pvq, Pmr, Pmq, Rad, PzJ, Pmax, StpHt, TIR, Avg, Slope, Area+, Area-, Area, Profl, Edge, StpWd, Bumpht Waviness of profile: Wa, Wq, Wt, Wz, Wp, Wv, WSm, Wsk, Wku, Wdq, Wdc, Wmr, Wpc, Wc, Wh, Wmr(WZ/4) Motif: R, AR, W, AW, Rx, Wx, Wte, Nr, Ncrx, Nw, Cpm, CR, CF, CL ISO5436: Pt5436, D  | 
Ra Measuring Range  | Ra0.012μm~Ra12.5μm  | 
Accuracy  | 5%  | 
Filter  | 2RC filtering, Gaussian filtering and Zero phase filtering  | 
Sampling Length  | 0.008, 0.08, 0.25, 0.8, 2.5, 8.0, 25mm  | 
Evaluation Length  | Automatic calculation  | 
Cutoff Wavelength  | 0.25/0.8/2.5(mm) or User-defined cut-off  | 
Travel Range X  | 0~200mm  | 
Travel Range Z  | 0~450mm  | 
Size(LxWxH)  | 800*450*1100mm  | 
Weight  | 220kg  |