Model | V6100 |
Size | 520×380×600mm |
Weight | 50kg |
Principle | Spinning disk confocal optical system |
Objective Lens | 10X,50X(Optional: 5X, 20X,50X,100X APO) |
Field of View | 120×120 μm~2.4×2.4 mm |
Repeatability(1σ) | ≤12nm |
Accuracy*1 | ≤ ± (0.2+L/100) μm |
Display Resolution | 0.1nm |
Repeatability(1σ) | 40nm |
Accuracy*2 | ± 2% |
Display Resolution | 1nm |
X Y Size | 200x200mm |
X Y Travel Range | 100x100mm |
Load Capacity | 10kg |
Control Method | Motorized |
Z Travel Range | 100mm |
Control Method | Motorized |
Lens Turret | Motorized 5 holes turret |
Light Source | White LED |
Model | V6200 |
Size | 720×580×1500mm |
Weight | 400kg |
Principle | Spinning disk confocal optical system |
Objective Lens | 10X,50X(Optional: 5X, 20X,50X,100X APO) |
Field of View | 120×120 μm~2.4×2.4 mm |
Repeatability(1σ) | ≤12nm |
Accuracy*1 | ≤ ± (0.2+L/100) μm |
Display Resolution | 0.1nm |
Repeatability(1σ) | 40nm |
Accuracy*2 | ± 2% |
Display Resolution | 1nm |
X Y Size | 230x230mm |
X Y Travel Range | 200x200mm |
Load Capacity | 10kg |
Control Method | Motorized |
Z Travel Range | 100mm |
Control Method | Motorized |
Lens Turret | Motorized 5 holes turret |
Light Source | White LED |
Model | V6300 |
Size | 1000 ×900×1500mm |
Weight | 500kg |
Principle | Spinning disk confocal optical system |
Objective Lens | 10X,50X(Optional: 5X, 20X,50X,100X APO) |
Field of View | 120×120 μm~2.4×2.4 mm |
Repeatability(1σ) | ≤12nm |
Accuracy*1 | ≤ ± (0.2+L/100) μm |
Display Resolution | 0.1nm |
Repeatability(1σ) | 40nm |
Accuracy*2 | ± 2% |
Display Resolution | 1nm |
X Y Size | 230x230mm |
X Y Travel Range | 200x200mm |
Load Capacity | 10kg |
Control Method | Motorized |
Z Travel Range | 100mm |
Control Method | Motorized |
Lens Turret | Motorized 5 holes turret |
Light Source | White LED |