Microscopic Measuring Machine
Microscopic Measuring Machine
Objective Lens | 10X | 20X | 50X |
Image Senor | Industrial Colorful Camera | Industrial Colorful Camera | Industrial Colorful Camera |
Monitor | 24" LCD (XGA: 1920x1080) | 24" LCD (XGA: 1920x1080) | 24" LCD (XGA: 1920x1080) |
Lens Turret | 3 Holes Manual(Optional: 5 holes motorized) | 3 Holes Manual(Optional: 5 holes motorized) | 3 Holes Manual(Optional: 5 holes motorized) |
Single F.O.V. | 0.98×0.98mm | 0.49×0.49mm | 0.196×0.196mm |
Lateral Resolution*1 | 2μm | 1μm | 0.4μm |
Single F.O.V. | ±0.3μm | ±0.2μm | ±0.1μm |
Motion Axis Ex/Ey | ±（ 2.0+0.02 L ）μm | ±（ 2.0+0.02 L ）μm | ±（ 2.0+0.02 L ）μm |
Repeatability in Single F.O.V. *3 | ±0.1μm | ±0.1μm | ±0.05μm |
