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3D Optical Profilometers

SuperView T3000 Hybrid 3D Optical Profilometer

Model

SuperView T3000

SuperView T3200

Light Source

White Light LED

White Light LED

Video System

1024x1024

1024x1024

Interference Objective Lens

10X (2.5X, 5X, 20X, 100X optional)

10X (2.5X, 5X, 20X, 100X optional)

Confocal Objective Lenses

10X, 50X(5X, 20X, 100X optional)

10X, 50X(5X, 20X, 100X optional)

Standard Field of View

1.2x1.2mm (10x)

1.2x1.2mm (10x)

Lens Turret

Motorized 5-hole turret

Motorized 5-hole turret

XY Table Size

200×200mm

300×300mm

XY Travel Range

100×100mm

200×200mm

XY Load Capacity

10kg

10kg

Control Mode

Motorized

Motorized

Tilt

±3°

±3°

Z - axis Travel Range

100mm

100mm

Z - axis Control Mode

Motorized

Motorized

Z Stroke Scanning Range

10mm

10mm

Surface Topography Repeatability STR*1

0.1nm (White light interferometry)

0.1nm (White light interferometry)

Roughness RMS Repeatability*2

0.005nm (White light interferometry)

0.005nm (White light interferometry)

Step Height Measurement*3

Accuracy: 0.5%; Repeatability: 0.1% (1σ) (White light interferometry)

Accuracy: 0.5%; Repeatability: 0.1% (1σ) (White light interferometry)


The Hybrid 3D optical profilometer Superview T series is used for sub nanometer measurement of surfaces of various precision components and materials. It integrates the performance characteristics of two high-precision 3D measuring instruments, white light interferometer and confocal microscope, and can perform non-contact scanning of the samples surface then re-establish 3D surface image. When measuring the ultra smooth and transparent surfaces, white light interferometry mode can be used to obtain high-precision and distortion-free images, and analyze parameters such as roughness. When measuring coarse surfaces with sharp angle features, confocal microscopy mode can reconstruct large angle 3D topography images, and 2D & 3D parameters reflecting surface quality are obtained by data processing and analysis of surface 3D images through software.

Nano 3D Optical Surface Profilometers SuperView W3

Size

1000*900*1550mm

Weight

500 kg

Light source

White LED

Video system

1024×1024

Objective Lens

10x(2.5x,5x,20x,50x,100x optional)

Optical Zoom

0.5x(0.75x,1x,0.375x optional)

Standard F.O.V.

0.98×0.98 mm

Lens Turret

Motorized 5 holes-turret

XY Size

450×450mm

XY Travel Range

300×300mm

XY Loading Capacity

10kg

XY Control Method

Motorized

Tilt

±5° Motorized

Z Travel Range

100mm

Z Control Method

Motorized

Z-Stoke Scanning Range

10mm

Z Resolution

0.1nm

Roughness RMS Repeatability *1

0.005nm

Stage Height Accruacy *2

0.3%

Stage Height Repeatability *2

0.08% 1σ

Description
SuperView W3 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image. The SuperView W3 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.
Dedicated Functions for Semiconductor Field
  • Measure profile trenches after laser grooving in the dicing process.
  • Measure film step-height of wafer ranging from 1nm~1mm.
  • Measure roughness of silicon cut sheet after grinding process, and can measure
  • dozens of small areas to obtain the average value by one click.
  • Support 6", 8" and 12" wafer measurement, and easy switch between 3 sizes of
  • vacuum chucks by one click automatically.
Made on
Tilda